Shielding technique for deposition of Au electrical contacts on graphene by sputtering

Authors

Bing Li
Genhua Pan, School of Engineering, Computing and Mathematics
Nawfal Y. Jamil
Taan L Al
Shakil Awan, School of Engineering, Computing and Mathematics
Neil Avent

ORCID

• Genhua Pan: 0000-0002-2678-7898
• Shakil Awan: 0000-0002-8543-3328

DOI Link

10.1116/1.4916589

Publication Date

2015-03-31

Publication Title

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Volume

33

Issue

3

ISSN

0734-2101

Acceptance Date

2015-03-19

Recommended Citation

Li, B., Pan, G., Jamil, N., Al, T., Awan, S., & Avent, N. (2015) 'Shielding technique for deposition of Au electrical contacts on graphene by sputtering', JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 33(3). Available at: 10.1116/1.4916589