Abstract

We detect changes in the optical properties of a metal oxide semiconductor (MOS), ZnO, in a multi-thin-film matrix with platinum in the presence of the hydrocarbon gas methane. A limit of detection of 2% by volume with concentrations from 0 to 10% and maximum resolution of 0.15% with concentrations ranging from 30% to 80% at room temperature are demonstrated along with a selective chemical response to methane over carbon dioxide and the other alkane gases. The device yields the equivalent maximum bulk refractive index spectral sensitivity of 1.8 × 105 nm/RIU. This is the first time that the optical properties of MOS have been monitored to detect the presence of a specific gas. This single observation is a significant result, as MOS have a potentially large number of target gases, thus offering a new paradigm for gas sensing using MOSs.

DOI

10.1016/j.snb.2017.08.058

Publication Date

2018-02-01

Publication Title

Sensors and Actuators B: Chemical

Volume

255

Publisher

Elsevier BV

ISSN

0925-4005

Embargo Period

2024-11-22

Keywords

Fibre optics, Gas sensing, Localized surface plasmons, Metal oxide semiconductors, Optical sensing

First Page

843

Last Page

853

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