Abstract
This paper examines wet and dry fabrication of vertical micro-mirrors in (110) silicon for use in an innovative BioMEMS integrating gripping and micro force sensing functionalities. Wet anisotropic chemical etching in potassium hydroxide (KOH) and tetramethyl ammonium hydroxide (TMAH) with and without isopropanol alcohol (IPA) additive was examined. Deep Reactive Ion Etched samples were produced using inductive coupled process. 3D surface roughness of samples was examined using scanning electron microscope, interferometric profilometer and atomic force microscopy. An optic fiber displacement sensor was exploited to measure the reflectivity of uncoated or coated samples with evaporated metallic thin film. The research aimed to find optimal fabrication technique for fabricating vertical micro-mirrors in polymer based BioMEMS. TMAH etched silicon samples with surface roughness R a = 15.1 nm showed highest reflectivity of all structures fabricated, reflectivity was more than doubled by adding a 10 nm layer of evaporated aluminum coating.
DOI
10.1007/s00542-011-1362-3
Publication Date
2011-12-01
Publication Title
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume
17
Issue
12
Publisher
Springer Science and Business Media LLC
ISSN
1432-1858
Embargo Period
2024-11-22
Additional Links
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=000297161300009&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11bb513d99f797142bcfeffcc58ea008
First Page
1763
Last Page
1770
Recommended Citation
Mackay, R., Lionis, N., & Le, H. (2011) '3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS', MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 17(12), pp. 1763-1770. Springer Science and Business Media LLC: Available at: https://doi.org/10.1007/s00542-011-1362-3
